Semiconductor specific multi-channel temperature control equipment
Mainly used for precise temperature control of multiple reaction chambers in semiconductor processes, the device consists of a heat exchanger, a circulating pump, a compressor, and a control system. Advanced control algorithms are used to improve the stability, temperature control accuracy, and reaction speed of the chiller. The temperature control accuracy can reach ± 0.5 ℃ under load conditions, and can be controlled arbitrarily between -20 ℃ and 85 ℃, with good temperature stability.
 
		 
  
 




 
			 
			 
			 
			 
			 
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